video
Introduction to DXRL: Deep X-ray Lithography at the Elettra synchrotron in Trieste
Deep X-ray lithography is a manufacturing process by which a pattern can be transferred to a sample material. DXRL can be used mainly for 2 kind of applications: standard fabrication of microdevices, for which the technique was invented, and for which it can be used also for industrial applications; and for radiation assisted material synthesis and processing.
The video showcases how DXRL work and what it is used for.
Keywords: CERIC, Central European Research Infrastructure Consortium, deep x-ray lithography, DXRL
Target audience: researchers, scientists, engineers
Resource type: Video Lecture
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